JPH0347584B2 - - Google Patents

Info

Publication number
JPH0347584B2
JPH0347584B2 JP60095800A JP9580085A JPH0347584B2 JP H0347584 B2 JPH0347584 B2 JP H0347584B2 JP 60095800 A JP60095800 A JP 60095800A JP 9580085 A JP9580085 A JP 9580085A JP H0347584 B2 JPH0347584 B2 JP H0347584B2
Authority
JP
Japan
Prior art keywords
wafer
film
suction table
porous plastic
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60095800A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61254305A (ja
Inventor
Saburo Myamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP60095800A priority Critical patent/JPS61254305A/ja
Publication of JPS61254305A publication Critical patent/JPS61254305A/ja
Publication of JPH0347584B2 publication Critical patent/JPH0347584B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP60095800A 1985-05-02 1985-05-02 半導体ウエハの表面保護方法 Granted JPS61254305A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60095800A JPS61254305A (ja) 1985-05-02 1985-05-02 半導体ウエハの表面保護方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60095800A JPS61254305A (ja) 1985-05-02 1985-05-02 半導体ウエハの表面保護方法

Publications (2)

Publication Number Publication Date
JPS61254305A JPS61254305A (ja) 1986-11-12
JPH0347584B2 true JPH0347584B2 (en]) 1991-07-19

Family

ID=14147509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60095800A Granted JPS61254305A (ja) 1985-05-02 1985-05-02 半導体ウエハの表面保護方法

Country Status (1)

Country Link
JP (1) JPS61254305A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02214134A (ja) * 1989-02-15 1990-08-27 Nitto Denko Corp 半導体ウエハマウンタにおける粘着テープテンション付与装置
JP2856216B2 (ja) * 1989-06-09 1999-02-10 富士通株式会社 半導体ウエハに粘着テープを接着する方法
JP7372845B2 (ja) * 2020-01-17 2023-11-01 株式会社ディスコ 載置面清掃方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986547A (ja) * 1982-11-04 1984-05-18 Nitto Electric Ind Co Ltd キヤリヤ治具用フイルム貼着装置
JPS59103354A (ja) * 1983-09-21 1984-06-14 Hitachi Ltd 板状物の貼着装置

Also Published As

Publication number Publication date
JPS61254305A (ja) 1986-11-12

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